Title: depth of focus
Long Title: IUPAC Gold Book - depth of focus
DOI: 10.1351/goldbook.09467
Status: current

Definition
Tolerance of the placement of the image plane in relation to image quality.

Note
Term used in an exposed and developed photoresist.

Related Term
- image: https://goldbook.iupac.org/terms/view/09495

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1870 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09467/html
- json: https://goldbook.iupac.org/terms/view/09467/json
- xml: https://goldbook.iupac.org/terms/view/09467/xml

Citation: Citation: 'depth of focus' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09467
License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms.
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Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-08-10T05:49:08+00:00