Title: line-space patterning
Long Title: IUPAC Gold Book - line-space patterning
DOI: 10.1351/goldbook.09502
Status: current

Definition
Developed lithographic pattern comprising alternating lines with spaces between.

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1876 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09502/html
- json: https://goldbook.iupac.org/terms/view/09502/json
- xml: https://goldbook.iupac.org/terms/view/09502/xml

Citation: Citation: 'line-space patterning' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09502
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Accessed: 2026-08-09T09:50:28+00:00