Title: depth profile
Long Title: IUPAC Gold Book - depth profile
DOI: 10.1351/goldbook.D01606
Status: current

Definition
Dependence of concentration on depth perpendicular to the surface in a solid sample. It can be obtained by a simultaneous or sequential process of erosion and surface analysis or by measurement of the energy loss of primary backscattered particles produced by nuclear reactions.

Source
- PAC, 1979, 51, 2243. 'General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2247 (https://doi.org/10.1351/pac197951112243)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/D01606/html
- json: https://goldbook.iupac.org/terms/view/D01606/json
- xml: https://goldbook.iupac.org/terms/view/D01606/xml

Citation: Citation: 'depth profile' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.D01606
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Accessed: 2026-07-24T04:01:20+00:00