Title: ion scattering spectrometry
Long Title: IUPAC Gold Book - ion scattering spectrometry
DOI: 10.1351/goldbook.I03243
Status: current

Definition
Any technique using low energy (\(10\ \rm{keV}\)) ions in which the bombarding particles scattered by the sample are detected and recorded as a function of energy and/or angle. This technique is used mainly for determining the composition and structure of the first few atomic layers of a sample.

Related Term
- angle: https://goldbook.iupac.org/terms/view/A00346

Source
- PAC, 1979, 51, 2243. 'General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2246 (https://doi.org/10.1351/pac197951112243)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/I03243/html
- json: https://goldbook.iupac.org/terms/view/I03243/json
- xml: https://goldbook.iupac.org/terms/view/I03243/xml

Citation: Citation: 'ion scattering spectrometry' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.I03243
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Accessed: 2026-05-09T21:50:19+00:00